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A practical guide to optical metrology for thin films

  1. QUINTEN, Michael. A practical guide to optical metrology for thin films. Weinheim : Wiley-VCH, c2013. xii, 211 s. Available on Internet: <http://deposit.d-nb.de/cgi-bin/dokserv?id=4014765&prov=M&dok_var=1&dok_ext=htm> ISBN 978-3-527-41167-2.

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