Number of the records: 1
Journal of vacuum science and technology B
- P-Č 17691
Journal
Journal of vacuum science and technology B: microelectronics and nanometer structures, processing, measurement and phenomena. -- Roč. 28, č. 1-6 (2010). -- New York American Institute of Physics. -- ISSN : 1071-1023.
technologie. fyzika
001.126-029:6
Number of the records: 1