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Plasma processing of nanomaterials
Title statement Plasma processing of nanomaterials [electronic resource] / edited by R. Mohan Sankaran. Issue data Boca Raton, FL : CRC Press, c2012 Phys.des. 1 online resource (xiii, 408 p.) : ill. (some col.). ISBN 1439866775 (electronic bk.) 9781439866771 (electronic bk.) Edition Nanomaterials and their applications Internal Bibliographies/Indexes Note Includes bibliographical references and index. Contents 1. Nanoscale etching and deposition / Nathan Marchack and Jane P. Chang -- 2. Extreme ultraviolet light lithography for producing nanofeatures in next-generation semiconductor processing / John Sporre and David N. Ruzic -- 3. Nonthermal plasma synthesis of semiconductor nanocrystals / Uwe Kortshagen and Lorenzo Mangolini -- 4. Microscale plasmas for metal and metal oxide nanoparticle synthesis / Davide Mariotti and R. Mohan Sankaran -- 5. Large-scale, plasma-assisted growth of nanowires / Uros Cvelbar and Mahendra K. Sunkara -- 6. Cathodic arc discharge for synthesis of carbon nanoparticles / Manish Chhowalla and H. Emrah Unalan -- 7. Atmospheric plasmas for carbon nanotubes (CNTs) / Jae Beom Park, Se Jin Kyung, and Geun Young Yeom -- 8. Structural control of single-walled carbon nanotubes by plasma chemical vapor deposition / Rikizo Hatakeyama and Toshiaki Kato -- 9. Graphene growth by plasma-enhanced chemical vapor deposition (PECVD) / M. Meyyappan and Jeong-Soo Lee -- 10. Modeling aspects of plasma-enhanced chemical vapor deposition of carbon-based materials / Erik Neyts ... [et al.] -- 11. Modeling catalytic growth of one-dimensional nanostructures / Eugene Tam, Kostya (Ken) Ostrikov, and Tony Murphy -- 12. Diagnostics of energy fluxes in dusty plasmas / Horst R. Maurer and Holger Kersten -- 13. Selective functionalization and modification of carbon nanomaterials by plasma techniques / Yuhua Xue and Liming Dai -- 14. Plasma-liquid interactions for fabrication of nanobiomaterials / Toshiro Kaneko and Rikizo Hatakeyama -- 15. Assembly and self-organization of nanomaterials / Amanda Evelyn Rider and Kostya (Ken) Ostrikov. Another responsib. Sankaran, R. Mohan (Ramanathan Mohan) Subj. Headings Nanostructured materials. * Plasma engineering. * SCIENCE / Physics. * TECHNOLOGY & ENGINEERING / Electronics / Microelectronics. * TECHNOLOGY & ENGINEERING / Material Science. * SCIENCE / Nanoscience * TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS Form, Genre Electronic books. Conspect SCI - 050000 TEC - 027000 Country Florika Language angličtina URL http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=429874 Document kind ***nezařazeno***
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