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Journal of vacuum science and technology. Part A
Title statement Journal of vacuum science and technology. Part A: vacuum, surfaces and films Issue data New York : American Institute of Physics ISSN 0734-2101 Divided into Journal of Vacuum Science and Technology. Part B. Microelectronics processing and phenomena Subj. Headings technologie * fyzika Form, Genre odborné časopisy Conspect 53 - Fyzika UDC 533 Country Spojené státy americké Language angličtina URL http://ojps.aip.org/jvst/ Document kind PERIODIKA - Souborný záznam periodika References Souborný záznam: použijte odkaz na záznam čísla nebo svazku Numbers 2017: 1, 2, 3, 4, 5, 6 2016: 1, 2, 3, 4, 5, 6 2015: 1, 2, 3, 4, 5, 6 2014: 1, 2, 3, 4, 5, 6 2013: 1, 2, 3, 4, 5, 6 2012: 1, 2, 3, 4, 5, 6 2011: 1, 2, 3, 4, 5, 6 2010: 1, 2, 3, 4, 5, 6 2009: 1, 2, 3, 4, 5, 6 2008: 1, 2, 3, 4, 5, 6 Bunches 2018: 1-6 2017: 1-6 2016: 1-6 2015: 1-6 2014: 1-6 2013: 1-6 2012: 1-6 2011: 1-6 2010: 1-6 2009: 1-6 2008: 1-6 2007: 1-6 2006: 1- 2005: 1- 2004: 1- 2003: 1- 2002: 1- 2001: 1- 2000: 1- 
Number of the records: 1