Ion implantation techniques : lectures given at the ion implantation school in connection with fourth international conference on ion implantation: quipment and techniques berchtesgaden, Fed. rep. of Germany, september 13–15, 1982 / Editors: H. Ryssel and H. Glawischnig   .  Berlin ; Heidelberg : Springer, 1982 . 1 online zdroj (xii, 366 stran)